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Prototype MEMS Capacitive Pressure Sensor Design and Manufacturing

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Tartalom: https://pp.bme.hu/eecs/article/view/2066
Archívum: PP Electrical Engineering and Computer Science
Gyűjtemény: Articles
Cím:
Prototype MEMS Capacitive Pressure Sensor Design and Manufacturing
Létrehozó:
Kárpáti, Tamás; Institute for Technical Physics and Materials Science, RCNS, HAS
Pap, Andrea Edit; Institute for Technical Physics and Materials Science, RCNS, HAS
Kulinyi, Sándor; Weszta-T Kft.
Kiadó:
Budapest University of Technology and Economics (BME)
Dátum:
2013-12-09
Téma:
capacitive pressure sensor, micromachining, MEMS, anodic bonding
Tartalmi leírás:
Nyelv:
angol
Típus:
info:eu-repo/semantics/article
info:eu-repo/semantics/publishedVersion
Formátum:
application/pdf
Azonosító:
https://pp.bme.hu/eecs/article/view/2066
10.3311/PPee.2066
Forrás:
Periodica Polytechnica Electrical Engineering and Computer Science; Vol. 57, No. 1 (2013); 3-7
Kapcsolat:
https://pp.bme.hu/eecs/article/view/2066/6172
Létrehozó:
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