Ion Mass Spectrometry Investigations of the Discharge during Reactive High Power Pulsed and Direct Current Magnetron Sputtering of Carbon in Ar and Ar/N2
  • Metaadatok
Tartalom: http://liu.diva-portal.org/smash/get/diva2:548258/FULLTEXT01
Archívum: REAL
Gyűjtemény: Status = Published
Subject = Q Science / természettudomány: QC Physics / fizika
Type = Article
Cím:
Ion Mass Spectrometry Investigations of the Discharge during Reactive High Power Pulsed and Direct Current Magnetron Sputtering of Carbon in Ar and Ar/N2
Létrehozó:
Schmidt, S.
Czigány, Zsolt
Greczynski, G.
Hultman, L.
Dátum:
2012
Téma:
QC Physics / fizika
Típus:
Article
PeerReviewed
Formátum:
text
Azonosító:
Schmidt, S. and Czigány, Zsolt and Greczynski, G. and Hultman, L. (2012) Ion Mass Spectrometry Investigations of the Discharge during Reactive High Power Pulsed and Direct Current Magnetron Sputtering of Carbon in Ar and Ar/N2. JOURNAL OF APPLIED PHYSICS, 112 (1). 013305. ISSN 0021-8979
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