Tailored voltage waveform capacitively coupled plasmas in electronegative gases: frequency dependence of asymmetry effects
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Content: http://real.mtak.hu/51422/
Archive: REAL
Set: Status = Published
Subject = Q Science / természettudomány: QC Physics / fizika: QC04 Electricity. Magnetism. Electromagnetism / villamosság, mágnesesség, elektromágnessesség
Subject = Q Science / természettudomány: QC Physics / fizika: QC05 Physical nature of matter / részecskefizika
Type = Article
Title:
Tailored voltage waveform capacitively coupled plasmas in electronegative gases: frequency dependence of asymmetry effects
Creator:
Schüngel, Edmund
Korolov, Ihor
Bruneau, B.
Derzsi, Aranka
Johnson, E.
O’Connell, D.
Gans, T.
Booth, J-P.
Donkó, Zoltán
Schulze, Julian
Date:
2016-05-31
Subject:
QC04 Electricity. Magnetism. Electromagnetism / villamosság, mágnesesség, elektromágnessesség
QC05 Physical nature of matter / részecskefizika
Description:
Type:
Article
PeerReviewed
Format:
text
Identifier:
Schüngel, Edmund and Korolov, Ihor and Bruneau, B. and Derzsi, Aranka and Johnson, E. and O’Connell, D. and Gans, T. and Booth, J-P. and Donkó, Zoltán and Schulze, Julian (2016) Tailored voltage waveform capacitively coupled plasmas in electronegative gases: frequency dependence of asymmetry effects. JOURNAL OF PHYSICS D-APPLIED PHYSICS, 49. p. 265203. ISSN 0022-3727
Relation:
https://doi.org/10.1088/0022-3727/49/26/265203